Frequency Output, A multi-modes Vacuum Gauge with Highly Output linearity Based on Electrostatic Nonlinearity

摘要

Based on electrostatic nonlinearity, this paper mainly introduces a MEMS resonant vacuum gauge (RVG) for low vacuum measurement. With the merits of small size, low power consumption and wonderful output linearity, the RVG could be widely used in various condition, especially for embedded measurement. The gauge has multi-working modes due to different driving methods. There are three modes has been measured under different pressure, named the second-order resonant mode (the second mode in short), the third mode and the fourth mode, respectively. Measurement results illustrates that the second mode has nearly no relationship with pressure variation, the third-order mode measures 1Pa~500Pa, linear fitting shows a wonderful output linearity (R^{2=0.995) and resolution (superior than 0.5Pa); measurement range of the fourth mode covers IPa~5000Pa, fitting results shows a highly linearity (R2=0.997) and about 1Pa in resolution.}