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Prediction of Hardness in Titanium Aluminium Nitride TiA1N Coating Process: A Review

机译:氮化钛钛涂层工艺硬度预测 - 综述

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This paper reviewed on prediction of hardness performances for Titanium Aluminium Nitride (TiA1N) coating process. A new application in predicting the hardness performances of TiA1N coatings using a method called support vector machine (SVM) is investigated. TiA1N coatings are usually used in high-speed machining due to its excellent surface hardness and wear resistance. The TiA1N coatings were produced using Physical Vapour Deposition magnetron sputtering process. The coating process parameter will be selected as the input parameters and the hardness as an output of the process. There are several coating process parameters in TiA1N coating process but for this paper only three coating process parameter will be considered. A support vector machine model will be proposed to predict the coating hardness with respect to changes in input process parameters which are substrate sputtering power, bias voltage and temperature. In this paper, a literature survey concerning the prediction technique of TiA1N coating process is conducted in order to clarify their coating process and coating process parameters. The issues and trend in prediction of hardness performances for TiA1N coating process also discussed based on various perspectives.
机译:本文综述了氮化钛(TIA1N)涂布过程的硬度性能预测。研究了使用称为支撑载体机(SVM)的方法预测TIA1N涂层硬度性能的新应用。由于其优异的表面硬度和耐磨性,Tia1N涂层通常用于高速加工。使用物理气相沉积磁控溅射工艺生产Tia1N涂层。将选择涂层处理参数作为输入参数和硬度作为该过程的输出。 Tia1N涂布过程中有几个涂层工艺参数,但对于本文仅考虑三种涂布工艺参数。将提出一种支持向量机模型来预测相对于输入处理参数的变化的涂层硬度,其是基板溅射功率,偏置电压和温度。本文进行了关于Tia1N涂覆工艺预测技术的文献调查,以阐明其涂覆过程和涂覆工艺参数。基于各种观点讨论了TIA1N涂层过程硬度性能预测的问题和趋势。

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