Deposition and Characterization of Chromium Doped Tin Oxide Transparent Conducting Thin Films Prepared by Spray Pyrolysis Technique

摘要

Emergenceof innovative technological deposition technique of spray pyrolysis enabled the enhancement of structural,optical,and electrical properties of Sn1-xCrxO2 (x=0.0,0.02,0.04,0.06,0.10,0.15) transparent semiconductors thin films in the present study.To evaluate these properties,X-Ray diffraction (XRD) spectroscopy were usedto study the elemental component and the crystalline nature of the materials while the optical properties and structure of the samples were evaluated using UV—vis spectroscopy and field emission scanning electron microscopy (FESEM).Finding showed that the Cr-doped SnO2 films were tetragonal in shape.Transmission spectra of the deposited films showed high transparency of～ 70-90％ in visible region with optical edge of 3.7eVfor SnO2.Resistivity of pure tin oxide samples was 0.01 Ω-Cm and increases with increase in dopant level.The Hall voltage showed that the type of semiconductor changed with increasing of dopant.