Prepare AFZO Thin Film Based Hydrogen Sensor for Anaerobic Hydrogen Fermentation System

摘要

In this study, aluminum and fluorine-doped zinc oxide (AFZO) thin film was used for hydrogen sensing. A compound of ZnO, ZnF_2 and Al_2O_3 was sintered at 1060 °C as a target and then deposited on glass using a radio frequency (RF) magnetron sputtering. The content of Al_2O_3 in AFZO is essential for the sensing performance improvement of anaerobic hydrogen fermentation system. On-line hydrogen measurement for anaerobic fermentation is an important technology. The on-line hydrogen sensor made of conducting thin film, AFZO, was designed to be used in reducing interferences in gas and liquid phase determination. The aluminum and fluorine-doped thin film has higher electric conductivity and chemical stability than those with the other components. The evaluation of the expected performance of this sensor in each component of anaerobic hydrogen fermentation system was carried out by means of the performance test in ambient air temperature and atmospheric pressure. The sensor performance in liquid phase was investigated by means of amperometry at 0.2 V(vs. Ag/AgCl). This sensor exhibited stable output and fast response when the hydrogen concentration in the gas or liquid phase was changed during anaerobic hydrogen fermentation.