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A smart pressure transducer with on-chip readout, calibration and nonlinear temperature compensation based on spline-functions

机译:具有片上读数,校准和非线性温度补偿的智能压力传感器,基于样条函数

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A smart pressure transducer with a piezo resistive pressure sensor microbridge, digitally controlled readout electronics, and a nonlinear temperature compensation based on spline functions, is integrated on a single CMOS chip. The chip also contains a temperature sensor and control hardware for test and calibration functions. The calibration process of the sensing and temperature compensation parameters has been optimized for high volume production. The smart pressure transducer is in standard 2 /spl mu/m n-well CMOS technology completed by anisotropic cavity etching.
机译:具有压电压力传感器微磁,数字控制读出电子设备和基于样条函数的非线性温度补偿的智能压力传感器,集成在单个CMOS芯片上。 该芯片还包含用于测试和校准功能的温度传感器和控制硬件。 感测和温度补偿参数的校准过程已针对大批量生产进行了优化。 智能压力传感器由各向异性腔蚀刻完成的标准2 / SPL MU / M N-Well CMOS技术。

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