A smart pressure transducer with on-chip readout, calibration and nonlinear temperature compensation based on spline-functions

摘要

A smart pressure transducer with a piezo resistive pressure sensor microbridge, digitally controlled readout electronics, and a nonlinear temperature compensation based on spline functions, is integrated on a single CMOS chip. The chip also contains a temperature sensor and control hardware for test and calibration functions. The calibration process of the sensing and temperature compensation parameters has been optimized for high volume production. The smart pressure transducer is in standard 2 /spl mu/m n-well CMOS technology completed by anisotropic cavity etching.