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Fault Isolation of Open Defects Using Space Domain Reflectometry

机译:使用空域反射法对开放缺陷进行故障隔离

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Recently, a new approach for isolation of open faults in integrated circuits (ICs) was developed. It is based on mapping the radio-frequency (RF) magnetic field produced by the defective part fed with RF probing current, giving the name to Space Domain Reflectometry (SDR). SDR is a non-contact and nondestructive technique to localize open defects in package substrates, interconnections and semiconductor devices. It provides 2D failure isolation capability with defect localization resolution down to 50 microns. It is also capable of scanning long traces in Si. This paper describes the principles of the SDR and its application for the localization of open and high resistance defects. It then discusses some analysis methods for application optimization, and gives examples of test samples as well as case studies from actual failures.
机译:最近,开发了一种隔离集成电路(IC)中开路故障的新方法。它基于映射由馈入RF探测电流的缺陷部件产生的射频(RF)磁场,并命名为“空间域反射法(SDR)”。 SDR是一种非接触式和非破坏性技术,用于定位封装基板,互连和半导体器件中的开放缺陷。它提供2D故障隔离功能,缺陷定位分辨率低至50微米。它还能够扫描Si中的长迹线。本文介绍了SDR的原理及其在开路和高电阻缺陷定位中的应用。然后讨论了一些用于应用程序优化的分析方法,并给出了测试样本示例以及来自实际故障的案例研究。

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