ENHANCED BACK-SURFACE REFLECTANCE AND PASSIVATION CAPPING FROM THE APPLICATION OF INEXPENSIVE SPRAY/SPIN ON POLYMER COATINGS ON THIN ALD AL2O3 LAYERS

摘要

The wavelength-dependent optical properties of inexpensive spray/spin on dielectric films are assessed.These are produced by Optitune. Their ability to afford rear surface passivation is directly studied in an associatedpublication in these proceedings. Here we examine their effectiveness as back surface reflectors, either depositeddirectly on silicon or on a thin-ALD-Al_2O_3 film coated with aluminium. We show, compared to aluminium coatedsilicon, these dielectric afford superior reflectance, through direct measurements and modelling. Reflectancemodelling was performed with OPAL using the measured n and k, and was in reasonable agreement with directmeasurement of reflectance data. Secondly, we include passivation capping results. We demonstrate that SRV of141 cm/s can be obtained attained when 8 nm Al_2O_3 layer is capped with a polymer film after a rapid-thermal-annealsimulation of co-firing, and less than 71 cm/s-roughly half that of the uncapped Al_2O_3 case-after passivationreactivation.