Optical Properties of Nanostructured ZnO Films Influenced by Different Gas Ratio Deposition with Radio Frequency Magnetron Sputtering

摘要

ZnO nanostructures fabricated on the as-deposited ZnO films which were prepared with different gas ratio during a magnetron radio frequency sputtering. It was found that Zn rich thin film contributed to form much density ZnO nanostructures as well as exhibited higher intensity blue-green emission.