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Effects of Multi-Gates on Performance and Stability of Self-Aligned Coplanar a-IGZO TFTs

机译:多栅极对自对准共面a-IGZO TFT性能和稳定性的影响

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We studied the effects of multiple gates on the performance and stability of a-IGZO TFTs. The subthreshold region of transfer characteristics shift to negative gate voltage direction with increasing gate number, and the threshold voltage shift induced by positive gate bias stress decreases with increasing gate number.
机译:我们研究了多个栅极对a-IGZO TFT的性能和稳定性的影响。传输特性的亚阈值区域随着栅极数量的增加而向负栅极电压方向偏移,并且由正栅极偏置应力引起的阈值电压偏移随着栅极数量的增加而减小。

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