INFLUENCES OF PLASMA WORKING-GAS COMPOSITIONS ON THE IMPEDANCE OF THE ATMOSPHERIC RADIO-FREQUENCY GLOW DISCHARGES

摘要

The radio-frequency atmospheric-pressure glow discharge (RF APGD) plasmas produced using plasma generators with the water-cooled bare-metallic electrode configurations have promising prospects in many fields due to their unique advantages, such as low capital costs, flexible operation, high concentrations of the chemically reactive species, etc. The impedance matching between the RF power supply and the load (plasmas) is important for obtaining the stable RF APGDs. This paper aims at studying the variations of the load impedance during the complete discharge process with different plasma working gases by measuring the discharge voltage, current and the current-voltage phase difference. The experimental results are helpful for understanding the discharge process from the aspect of the impedance matching of the RF glow discharges at atmospheric pressure.