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TiN/ZrN MULTILAYER PVD COATINGS ON TITANIUM ALLOYS PRODUCED BY POWDER METALLURGY

机译:粉末冶金生产的钛合金上的TiN / ZrN多层PVD涂层

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摘要

Multilayer coatings are synthetic structures constituted by alternate layers of different materials. The technological applications of the multilayer coatings can involve optical, electromagnetism and wear areas. The target of this work is the production of multilayer TiN/ZrN coatings by Electron Beam Physical Vapor Deposition (EB-PVD) over titanium alloys produced by powder metallurgy. P/M-Ti-35Nb-7Zr-5Ta cylindrical samples used as substrates were produced by mixing of the elemental powders with subsequent cold pressing steps and sintering at 1400°C, in high vacuum. TiN/ZrN coatings were obtained by evaporation of alternating Ti and Zr cylindrical targets. The multilayers were characterized by optical and scanning electron microscopy (SEM), chemical analysis via energy dispersive spectrometry (EDS) and Vickers indentation. Besides the possibility of obtaining several layers, the results show coatings with coherent columnar structure, low discontinuity, large and homogenous thickness and high adhesion to substrate.
机译:多层涂层是由不同材料的交替层构成的合成结构。多层涂层的技术应用可能涉及光学,电磁和磨损领域。这项工作的目标是通过电子束物理气相沉积(EB-PVD)在粉末冶金生产的钛合金上生产多层TiN / ZrN涂层。 P / M-Ti-35Nb-7Zr-5Ta用作基材的圆柱形样品是通过将元素粉末与随后的冷压步骤混合并在1400°C的高真空下烧结而制得的。通过蒸发交替的Ti和Zr圆柱靶获得TiN / ZrN涂层。通过光学和扫描电子显微镜(SEM),通过能量色散光谱法(EDS)的化学分析和维氏压痕对多层膜进行表征。除了获得多层涂层的可能性外,结果还显示出涂层具有连贯的柱状结构,不连续性低,厚度大而均匀的涂层以及对基材的高附着力。

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