Preparation and Characterization of High Quality Lead-free BiFeO3 Thin Films by Sputtering Process

摘要

BiFeO3 (BFO) thin films have been prepared on SrTiO3 (001) single crystal substrates by sputtering process which is suitable for mass production. Domain structure can be controlled by off-cut angle and direction of SrTiO3 substrates. A lateral PFM and a XRD reciprocal space mapping results reveal the BFO thin film on SrTiO3 (001) with 4o off-cut along [110] is single domain. The single domain BFO shows well-saturated ferroelectric D-E hysteresis loops at R.T.