Effect of Annealing Treatments on the Physical Characteristics of (Ca_(0.8)Sr_(0.2))TiO_3 Thin Films by Sol-Gel Method

摘要

This paper describes physical properties of (Ca_(0.8)Sr_(0.2))TiO_3 which were deposited by sol-gel method with a fix per-heating temperature of 400°C for 60 min at various annealing temperatures from 600°C to 700°C for 60 min. Particular attention has been paid to the effects of an annealing treatment in air ambient on the physical properties. The annealed films were characterized using X-ray diffraction (XRD). The surface morphologies of annealed film were examined by atomic force microscopy and scanning electron microscopy. The selected-area diffraction pattern showed that the deposited films exhibited a polycrystalline microstructure. All films exhibited (Ca_(0.8)Sr_(0.2))TiO_3 orientation perpendicular to the substrate surface and the grain size of the film increased with the increase in both the annealing temperature and acetylacetonate addition.