DESIGN OF A HIGH BANDWIDTH NON-RESONANT TERTIARY MOTION GENERATOR FOR ELLIPTICAL VIBRATION TEXTURING

摘要

This paper presents the design and characteristics of a new two-dimensional non-resonant tertiary motion generator which is based on the flextensional structure. A tool holder connects two perpendicularly-placed flextensional actuators with flexure hinges which decouple the motion outputs from the two actuators. Piezoelectric stacks, which are preloaded through precision screws, are used to provide input displacements. By balancing the requirements of driving current, stiffness, and the displacement amplification ratio, the proposed design is targeted to operate at above 10 kHz with two-dimensional vibrations amplitude of 10 μm in each directions. Technical difficulties in driving a non-resonant mode piezoelectric actuator at a high frequency are discussed. The solutions and optimization procedures are presented in this paper. The design is optimized by finite element simulation; and the results are presented.