Friction Control Using Ultrasonic Vibration for Piezoelectric Translation Apparatus

摘要

We propose friction control using vibration for piezoelectric translation apparatus. The apparatus is an inchworm-type microactuator using piezos. By the use of vibration of the piezo, we can control a friction force which is a clamping force of the inchworm-type microactuator. The microactuator consists of push-pull piezos and a friction control piezo. The push-pull piezos deform in the horizontal direction. The horizontal piezos are operated by a trapezoidal waveform at about 1 Hz which is much smaller than the vibration frequency of the friction control piezo. The friction control piezo, which vibrates in the vertical direction intermittently, is operated by sinusoidal waveform at about 4.3 kHz. The vertical vibration of the piezo reduces the friction force between the element and operating surface. Experimental results show that the control sequence of the microactuator determines the moving direction of the proposed piezo translation apparatus.