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A Millimeter-range Flexure-based Micropositioning Stage Using a Self-guided Amplifying Mechanism

机译:使用自导放大机制的毫米范围基于挠曲的微定位平台

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In this work, a new single-axis flexure-based micropositioning stage is proposed, which is guided by a skewed double compound parallelogram. This skewed double compound parallelogram gives a function of guide mechanism as well as a function of displacement amplifier. Using this self-guided amplifying mechanism, a long-range motion can be achieved within a compact size. For an example, we designed a millimeter-range flexure-based stage using a stack-type piezo-actuator. Leaf-springs are utilized for hinges, which can be monolithically machined by electric discharge machining.
机译:在这项工作中,提出了一种新的单轴基于挠曲的微定位平台,该平台以偏斜的双复合平行四边形为导向。这种偏斜的双复合平行四边形既具有导向机构的功能,又具有位移放大器的功能。使用这种自导式放大机构,可以在紧凑的尺寸内实现远距离运动。例如,我们使用堆栈式压电致动器设计了毫米范围的基于挠性的平台。板簧用于铰链,铰链可以通过放电加工进行整体加工。

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