We developed a new 1 -D positioning system in which a contact-type linear encoder-like capacitive displacement sensor (CLECDiS) was integrated as a displacement sensor. CLECDiS is a capacitive displacement sensor capable of providing high-resolution displacement information over a long range. A new supporting mechanism was developed and tested for integrating CLECDiS into a positioning system composed of dual actuators. In addition, conditioning circuits and a decoder was developed to enable CLECDiS to be used as a feedback sensor. The developed system is proven to have sub-100-nm resolution over a 10-mm displacement range.
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