This paper describes the concept, design and development of a six-degree-of-freedom (6-DOF) micro parallel kinematic stage for multi-axis positioning. The stage consists of six piezoelectric elements (piezos) and six electromagnets. The stage can move in the five directions by the principle of an inchworm, and can elevate a platform in z-direction by the principle of a parallel mechanism. Some preliminary experiments indicate the 6-DOF motion of the proposed stage.
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