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A Six-degree-of-freedom Micro Parallel Kinematic Stage for Multi-axis Positioning

机译:用于多轴定位的六自由度微并联运动平台

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摘要

This paper describes the concept, design and development of a six-degree-of-freedom (6-DOF) micro parallel kinematic stage for multi-axis positioning. The stage consists of six piezoelectric elements (piezos) and six electromagnets. The stage can move in the five directions by the principle of an inchworm, and can elevate a platform in z-direction by the principle of a parallel mechanism. Some preliminary experiments indicate the 6-DOF motion of the proposed stage.
机译:本文介绍了用于多轴定位的六自由度(6-DOF)微型并联运动平台的概念,设计和开发。该平台由六个压电元件(压电)和六个电磁体组成。平台可以根据inch虫的原理在五个方向上移动,并且可以根据平行机构的原理在z方向上提升平台。一些初步的实验表明提出阶段的6自由度运动。

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