Synthesis of Zinc Oxide Nanoparticles in Microwave Reactor for TFT Fabrication

摘要

A simple, rapid, and environmentally friendly method was used to synthesize high quality nanoscale zinc oxide (ZnO) particles through microwave irradiation. The synthesized ZnO nanoparticles can be easily deposited on solid substrate (silicon wafer) through spin coating or dip coating. Such type of ZnO-based TFT devices is expected to have higher device performance than organic-based devices.