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Fast and accurate method for flaws localization in stacked die packages from acoustic microscopy echoes transients

机译:快速而准确的方法,用于从声学显微镜回波瞬态中找到堆叠式芯片封装中的缺陷定位

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The scanning acoustic microscopy (SAM) is widely used today by the manufacturers and researchers in failure analysis labs to improve the microelectronic devices reliability. The goal is to detect and locate flaws inside chips using non destructive test (NDT). New packaging technologies improve the number of layers in a single package using advancing formats including for example flip chip, ball grid array and thereby increasing the number of interfaces to study. This paper deals with the automatic detection of small flaws in the z-axis to reduce time of experiment and facilitate the localization of the flaws especially in solder bump joints and underfill.
机译:如今,制造商和研究人员在故障分析实验室中广泛使用扫描声显微镜(SAM)来提高微电子设备的可靠性。目的是使用无损检测(NDT)检测和定位芯片内部的缺陷。新的封装技术使用先进的格式(例如倒装芯片,球栅阵列)提高了单个封装中的层数,从而增加了研究接口的数量。本文致力于自动检测z轴上的小缺陷,以减少实验时间并促进缺陷的定位,特别是在焊锡凸点和底部填充方面。

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