High-Fidelity Optical Microphone Manufactured in Laminates

摘要

We have built an optical MEMS microphone using processes commonly found in the packaging and printed circuitindustry. Optical elements used to detect sound are manufactured using laminate processes and integrated ontoprinted circuit boards (PCB). Laminate MEMS (LMEMS) processing is an enabling technology that allowsdesigners more freedom in designing MEMS and the packaging and printed circuit industry the capabilities offabricating their own MEMS component. Using optics grade films and high-tolerance substrates, high-end electrooptical components have been manufactured in the form of laminate waveguides, optical microphones and passiveswitches.