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TRAPPING IN MULTI-CRYSTALLINE SILICON WAFERS: IMPACT OF LASER TREATMENT AND FIRING

机译:多晶硅的激光打靶和激光打靶

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Minority carrier traps in silicon affect photoconductance (PC)-based lifetime measurements at low and medium injection levels. In this study, the presence of minority carrier traps with a long PC decay time constant in multi-crystalline silicon wafers is unraveled for the first time. To study these traps even further, the effect of firing and laser treatment on them is investigated. It is shown that firing introduces a metastable state of traps while laser treatment annihilates the trapping effect and seems to affect the trap's concentration rather than its nature.
机译:硅中的少数载流子陷阱会影响中低注入水平下基于光电导(PC)的寿命测量。在这项研究中,首次揭示了多晶硅晶片中具有长PC衰减时间常数的少数载流子陷阱的存在。为了进一步研究这些陷阱,我们研究了点火和激光处理对它们的影响。结果表明,点火引入了陷阱的亚稳态,而激光处理消除了陷阱效应,似乎影响了陷阱的浓度,而不是其性质。

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