SENSITIVITY ANALYSIS OF FURNACE MATERIAL PROPERTIES IN CZOCHRALSKI CRYSTAL GROWTH METHOD FOR SILICON

摘要

Reliability of the simulation results is crucially dependent on the input data and in particular on the thermo-physical properties of the materials constituting the furnace such as thermal conductivity and emissivity of the surfaces. Uncertainties are always involved in measurement of these parameters. A set of global 2D simulations has been carried out in order to investigate the impact of each property on the simulation results. It has been shown that steel emissivity and felt conductivity have a significant impact on melt/crystal interface deflection, thermal field and energy consumption.