Novel frequency agile electromagnetic decoupling MEMS device

摘要

We firstly propose the concept of a frequency agile electromagnetic decoupling MEMS-based device. We experimentally show the feasibility of such an apparatus, and further work consists in cascading more than one decoupling device to achieve stronger electromagnetic decoupling values. The structure consists of a freestanding half-wavelength resonator mounted on a movable shuttle connected with large displacement comb actuators. The lateral movement of the shuttle over the main transmission line produces different electromagnetic decoupling values with a variable center frequency. The freestanding resonator plays the role of a loading capacitor as well as the decoupling mechanism in the proposed structure. The device is able to produce diverse decoupling and center frequency effects depending on the overlapping region between the main line and the movable shuttle.