Development of a strain sensor for rolling contact loads

摘要

Development of a strain sensor for rolling contact loads. - A strain sensor for high spatial resolution and low response time for rolling contact loads was developed and applied to an axial cylindrical roller bearing. The sensor consists of 100 nm thick titanium and is embedded in an aluminum oxide layer of 500 nm thickness that acts as a wear resistant and insulating layer. For an easy transfer of the process to radial surfaces only one photolithographic step is used.