Chloride ion selective electrode for detection of low chloride ion concentration

摘要

In this study, the ruthenium dioxide (RuO2) thin film was deposited on silicon (Si) substrate by radio frequency (R. F.) sputtering system. In order to optimize the sensing property of the chloride ion sensing device, the chloride ion selective membrane was prepared on sensing window of Si/RuO2 sensing device by dropping and spin coating methods, respectively. Furthermore, the chloride ion selective membrane was prepared by spin coating with different spinning rates, and the sensing property of chloride ion sensing device relating with spinning rate was investigated.