This work reports on the demonstration of a new class of high frequency piezoelectric aluminum nitride resonant sensors, dubbed Piezoelectric Resonant Nanochannels (PRNs), for operation in liquid environment with reduced viscous damping. A novel process consisting of 7 lithographic steps was developed to fabricate the PRNs of this work. The new resonant devices operating at high frequencies (278 and 458 MHz) show an unchanged value of the electromechanical coupling, kt2 (about 0.7 and 0.8%), whether the channel is filled with air or a liquid. A quality factor in fluid, Qf, as high as 464 and 340 is recorded when the 278 MHz PRN is filled with DI-water and 25% glycerol solution, respectively.
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机译：这项工作报告了一种新型的高频压电氮化铝共振传感器的演示，该传感器被称为压电共振纳米通道（PRN），可在液体环境中以降低的黏性阻尼运行。开发了由7个光刻步骤组成的新颖工艺，以制造这项工作的PRN。在高频（278和458 MHz）下运行的新型谐振装置显示出机电耦合值k t 2 不变（约为0.7和0.8％），通道中充满了空气或液体。当278 MHz PRN分别充满去离子水和25％甘油溶液时，记录到的流体品质因数Q f 分别高达464和340。
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