A Novel Double-ended Tuning Fork Quartz Accelerometer

摘要

In order to design a quartz accelerometer with high-precision vibration characteristics and strong resistance to external shock, a novel double-ended tuning fork quartz accelerometer that combines the well-known principles of the tuning fork techniques is developed. The mechanical structure of the double-ended tuning fork quartz accelerometer comprises of a pair of double-ended tuning forks, one damping plate and two covers. The operating principle of the double-ended tuning fork quartz accelerometer with two quartz tuning forks in push-pull configuration is described. The output difference frequency of the double-ended tuning fork accelerometer is proportional to the input acceleration. The dimension of the double-ended tuning fork and the flexural support are designed. The stress simulation experiment of the double-ended tuning fork quartz chip are carried out by FEM (Finite Element Method) Using ANSYS software and the result of the stress simulation experiment indicates that the value of the most axial tension and the most axial pressure are both 2.23 × 10⁶N/m², and less than the maximum safe stress of the quartz.