A universal technique for analysis of acoustic waves in periodic grating sandwiched between multi-layered structures and its application to different types of waves

摘要

A numerical technique, which combines FEM analysis of electrode area with matrix formalism applied to spectral domain analysis (SDA) of eigen modes in multi-layered substrate and multi-layered dielectric upper half-space, is described as an efficient tool of investigating the wave characteristics in periodic metal grating sandwiched between two multi-layered half-spaces, with arbitrary thickness of each layer. The universal character of the developed technique is illustrated by few examples of its application to different types of structure providing propagation of common SAW, boundary waves at interface, plate modes, normal modes in a thin film deposited over the grating etc. The transformation between the waves with continuously increasing film thicknesses can be observed.