Transformation of Acoustic Waves in Periodic Metal Grating Sandwiched Between Piezoelectric and Dielectric

摘要

The mechanism of SAW transformation with variation of film thickness is investigated in a piezoelectric substrate with a metal grating overlaid by a dielectric film, via simulation and visualization of the acoustic fields. By way of example, two orientations of lithium niobate substrates are analyzed, YX-LN and 128u000b0;YX-LN, with a Cu grating and an isotropic silica glass overlay. The motions, which follow the wave propagation in the sagittal plane, are visualized within two periods of the grating, with added contour plots showing the shear horizontal displacements. The continuous transformation of the wave''s nature is investigated for each wave propagating in the analyzed material structures when the film thickness is increased from zero to a few wavelengths. The examples of the SAW transformation into boundary waves and into plate modes of different polarization have been found and investigated. The behavior of the SAW characteristics in the grating is correlated with transformation of the wave structure with increasing overlay thickness.