PMMA as a base material for SU8 mold to fabricate PDMS relief

摘要

A novel fabrication technique using polymethylmethacrylate (PMMA) as a base material for SU8-10 film coating is to be discussed in this paper. The SU8-10 coated onto PMMA is used as a mold to fabricate PDMS relief. The SU8-10 mold has been tested for a square structure and various types of line resolutions. Propylene Glycol Methyl Ether Acetate (PGMEA) developing towards SU8-10 coated on PMMA for 2 hours is suitable for a 5mm × 5mm square structure whereas PGMEA developing for 30 minutes is found to be suitable to produce the smallest resolution of 2mm. The results have proven that PMMA is a promising material to be used as SU8-10 mold despite silicon or glass, two materials which have been commonly used for SU8-10 mold. PMMA in its natural structure is flexible, making it easy to drill and cut. Other advantages of PMMA lie in the facts that it is cheap, transparent and biocompatible.