FUNDAMENTALS OF DEVELOPING INTEGRATED DIGITAL CONTROL OF PRECISION STANDS WITH INERTIAL SENSORS USING SIGNALS FROM AN ANGULAR RATE SENSOR, ACCELEROMETER, AND AN OPTICAL ANGLE SENSOR

摘要

This paper examines new approaches to the development of digital control systems for precision rotary tables with inertial sensor elements - measuring devices of angular velocity and apparent acceleration, and with the use of information provided by a precision optical angle sensor. Development of control functionality occurs in a processor unit based on the majority evaluation of information from the primary measuring devices with the use of optimal filtering and control methods. The methods used can significantly improve accuracy characteristics of rotary tables.