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Non-metallic particles in Solar Grade Silicon (SoG-Si)

机译:太阳能级硅(SoG-Si)中的非金属颗粒

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This study investigated the non-metallic inclusions in Solar Grade Silicon (SoG-Si), especially the distribution of inclusions in the top 15mm layer of multicrystalline silicon ingot. The SoG-Si ingot produced from directional solidification process usually pushes the impurities to the top and finally cut off and discarded, which leads to material loss. The hard inclusions lead to wire breakages during the cutting of the ingot into wafers. The main kinds of inclusions found in top-cut silicon scraps from two manufacturers have been investigated using acid extraction, automated feature analysis techniques and SEM-EDS and optical Microscope: they are needle-like Si3N4 and lumpy SiC inclusions. Surface observations of the scraps before polishing revealed that, Si3N4 inclusions are usually bigger and in some cases can be about a few millimeters. SiC inclusions are usually smaller, ∼200µm but can be ∼500µm in some cases. For the directional solidified silicon ingot, it was determined that an approximate distance of ∼10mm is a good enough cutoff thickness.
机译:这项研究调查了太阳能级硅(SoG-Si)中的非金属夹杂物,特别是多晶硅锭顶部15mm层中夹杂物的分布。定向凝固过程产生的SoG-Si铸锭通常会将杂质推到顶部,最后被切断并丢弃,从而导致材料损失。硬质夹杂物在将晶锭切割成晶圆的过程中导致断线。已使用酸提取,自动特征分析技术以及SEM-EDS和光学显微镜对两家制造商的顶级硅废料中发现的主要夹杂物进行了研究:它们是针状Si 3 N < inf> 4 和块状SiC夹杂物。抛光前对废料的表面观察表明,Si3N4夹杂物通常较大,在某些情况下可能约为几毫米。 SiC夹杂物通常较小,约为200μm,但在某些情况下可以约为500μm。对于定向凝固的硅锭,确定约10mm的距离是足够好的截止厚度。

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