Vacuum circulating refining equipment for solar grade polysilicon and purification method for solar grade polysilicon

摘要

A vacuum recycling apparatus for refining solar grade polysilicon is provided which contains a vacuum degassing (VD) device 1 and a vacuum recycling (RH) device 2. By storing liquid silicon L in a bucket 12 in the VD device 1, controlling the pressure inside the VD and RH devices 1 and 2, and introducing inert gas into the apparatus, the liquid silicon L is stirred for the removal of impurities. With the present invention, solar grade polysilicon can be directly produced with a specified purity, significantly reducing the production time and cost.