This paper reports the design, fabrication, package and tests of a highly symmetric micro-machined vibrating ring gyroscope (MVRG). The ring is electrostatically driven, capacitively sensed and stiffness controlled for resonant frequency balancing by 16 electrode anchors inside the ring. A new method is proposed to fabricate the vibrating ring gyroscope through simple all-silicon high aspect ratio micro-fabrication technologies with only 2 masks. The test results show that the frequency split of the gyroscope can be adjusted from 160Hz before balancing to less than 0.1Hz after balancing, the Q-factor could achieve 22000 in vacuum, the resolution of the gyroscope is 0.05 °/s, and the measured non-linearity is 0.06% in the ±50 °/s range.
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