Monolithic planar accelerometer with a symmetric arrangement of two vibrating bodies supported by articulations and vibrating beams whose vibration is linked to acceleration of the structure to which the accelerometer is attached

摘要

Monolithic planar accelerometer comprises a body (12) having a base (16) and two measurement cells each having a seismic mass (24a-24b) connected to the base by an articulation (22) that allows the mass to rotate about an axis perpendicular to the detector axis of sensitivity and a vibrating beam linking the mass to the base. The cells are placed opposite to each other such that when one beam is subjected to a compression force, the other is subjected to a tensile force. The cells are arranged head to toe in a symmetric manner and there is an additional connection between each mass and the base via a monolithic frame (30) forming the sides of a diamond, of which a diagonal is formed by the beam (14a, 14b) and the apexes of the other diagonal are connected to the base and mass respectively.