首页> 外文会议>Electronic Design, Test and Application, 2010. DELTA '10 >Fast and Accurate Automatic Defect CLuster Extraction for Semiconductor Wafers
【24h】

Fast and Accurate Automatic Defect CLuster Extraction for Semiconductor Wafers

机译:快速,准确的半导体晶圆缺陷簇自动提取

获取原文

摘要

Reduction in integrated circuit (IC) half technology, which will no longer be sustainable by traditional fault isolation and failure analysis techniques. There is an urgent need for diagnostic software tools with (which manifest as clusters) observed from manufacturing defects can be traced back to a specific process, equipment or technology, a novel data mining algorithm defects from test data logs. This algorithm and provides accurate detection of 99%.
机译:减少一半的集成电路(IC)技术,这将不再是传统故障隔离和故障分析技术所能承受的。迫切需要一种诊断软件工具,该工具具有从制造缺陷中观察到的(表现为簇),可以追溯到特定的过程,设备或技术,一种来自测试数据日志的新颖的数据挖掘算法缺陷。此算法可提供99%的准确检测。

著录项

相似文献

  • 外文文献
  • 中文文献
  • 专利
获取原文

客服邮箱:kefu@zhangqiaokeyan.com

京公网安备:11010802029741号 ICP备案号:京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有
  • 客服微信

  • 服务号