THREE-DIMENSIONAL FIB-OIM OF CERAMIC MATERIALS

摘要

Three-dimensional characterization of materials is important for understanding and predicting their microstructural evolution and properties. Traditional serial sectioning of bulk samples is difficult, tedious, and not well suited for fined grained materials. In recent years, the dual-beam focused ion beam microscope has allowed for the prospect of three-dimensional characterization of fine grained materials to be performed more routinely. However, limited work has been performed on ceramics. Examples of three-dimensional reconstruction of orientation image maps from electron backscatter diffraction patterns are given for yttria-stabilized zirconia, alumina, strontium titanate and spinel.