Bio-molecules Detection Sensor Using Silicon Nanowire

摘要

To detect a signal change in nano scale, Schottky barrier - silicon nanowire field effect transistor (SB-SiNWFET) for detecting a bio-molecule was fabricated by combining E-beam lithography and conventional MEMS technique. Detection of few bio-molecules is enabled by realizing the gold nanodots on silicon nanowire (SiNW). By performing pH test and carbohydrate binding measurement, we conclude that our sensor can detect very small quantity of bio-molecules.