A multi-axis alignment system for evaluation of a quantum tunnelling linear encoder

摘要

This paper presents the development of an ultra-precision multi-axis alignment system (or test bed) used for evaluation of a nano-resolution position sensor, NanoTrek~R. To characterize the sensor performance, the alignment capability ensuring parallel surface contact between two opposite substrates is a key requirement. We addressed this issue by adopting a special coarse alignment module and a fine alignment module. The preliminary testing results show that the system is a viable tool for assessing the NanoTrek sensor.