Single Drive Multi-Axis Gyroscope with High Dynamic Range High Linearity and Wide Bandwidth

摘要

This paper presents the design, fabrication, and characterization of a highly sensitive, single drive multi-axis gyroscope. The multi-axis gyroscope allows for a wide bandwidth in all three axes (X, Y, Z) and exhibits high linearity. The fabricated multi-axis gyroscope was fabricated with a structural thickness of 30 µm and packaged at 100 mtorr using wafer level packaging. The fabricated multi-axis gyroscope has a small footprint of 1426 × 1426 µm², making it one of the smallest multi-axis gyroscopes. A custom printed circuit board (PCB) was designed for the evaluation of the multi-axis gyroscope. The experimental results demonstrate that the gyroscope has a high sensitivity of 12.56μV/dps,17.13μV/dps and 25.79μV/dps in the roll (X-sense), pitch (Y-sense) and yaw (Z-sense) modes respectively. The scale-factor non-linearity of the gyroscope is less than 0.2% for roll and pitch mode and 0.001% for the yaw mode, in the full-scale range of ±1500deg/s. The multi-axis gyroscope demonstrates an angle random walk of 2.79dps/Hz, 2.14dps/Hz, and 1.42dps/Hz, for the roll, pitch and yaw rate with the in-run bias stability 1.62deg/s, 1.14deg/s and 0.84deg/s respectively.