For reflecting the variation of plasma composition under different arc temperature and pressure for non-equilibrium states, a micro arc physical model of vacuum circuit breaker (VCB) is proposed based on Eindhoven model, and the parameters of CuCr50 contact were taken into considerations. The variations of number density for different particles are obtained. The numerical computation results show that, the particle composition of different non-equilibrium states vary with the specified pressure and the excitation temperature has a large influence on the particle composition. With the increase of pressure, particle number density varies in an upward tendency.
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