首页> 外文会议>Discharges and Electrical Insulation in Vacuum, 2008. ISDEIV 2008 >Ignition and burning of the nonself-sustained arc discharge in vapors of the anode material
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Ignition and burning of the nonself-sustained arc discharge in vapors of the anode material

机译:阳极材料蒸气中非自持电弧放电的点燃和燃烧

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We present the basic characteristics of the arc discharge in vapors of the anode material in crossed electric and magnetic fields. Information on the minimal vapor pressure of the working materials necessary for ignition and burning of the discharge is given. It is shown that the electric field can change substantially the characteristics of discharge and the parameters of created plasma flows. The values of deposition rate of metal films are given. The results of studying ionization coefficient, plasma potential, and floating potential in a plasma flow are also submitted.
机译:我们介绍了在交叉电场和磁场中阳极材料的蒸气中电弧放电的基本特征。给出了点火和燃烧放电所必需的工作材料的最小蒸气压的信息。结果表明,电场可以显着改变放电特性和产生的等离子体流的参数。给出了金属膜的沉积速率的值。还提交了研究电离系数,等离子体电势和等离子体流中的浮动电势的结果。

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