PHOTOELECTERON SPECTROSCOPIC ANALYSIS OF CHEMICAL STRUCTURE OF DIAMONDLIKE CARBON WITH DIFFERENT ELECTRICAL RESISTIVITIES

摘要

Diamondlike carbon (DLC) is an amorphous carbonaceous material, which is composed of sp~2 carbon, sp~3 carbon, and hydrogen. DLC films are applied to coating materials for industrial products and medical tools because DLC is lubricative, hard and economic. These characteristics depend on the chemical structure of DLC. The analysis method, however, has not been fully established yet. In this presentation, we propose a new method to determine the chemical structure of DLC with the results of the core-level photoelectron spectra of the DLC films with different electrical resistivities.