FEASIBILITY STUDY OF ACTIVE MICRO-VIBRATION CONTROL SYSTEM USING PIEZOELECTRIC ACTUATORS FOR FLOOR STRUCTURE OF PRECISION MANUFACTURING FACILITIES

摘要

As the semiconductor processing technology keeps evolving, the demand for vibration-free environment of semiconductor manufacturing facilities keeps becoming severe. We develop an active micro-vibration control system by using piezoelectric actuators to suppress the vibration of the floor in precision manufacturing facilities. The system is a smart structure that includes the actuators put on the beams of the floor, acceleration sensors and controllers. The main purpose is to suppress the vertical vibration of the floor where the machines are installed. The smart structure actuator is suitable for micro-vibration control except earthquakes for the limit of the capacity. Feasibility tests were executed by using a large-scale experimental model, which is a steel frame of two-dimensional truss to represent as the floor structure of the manufacturing facilities. The weight of the model is 1800kg and its span is 6m. The size of the piezoelectric actuator is 25 x 25 x 36mm. The test result shows that the exception vibration control performance is achieved and expresses the feasibility of the control system for the real structure.