STRUCTURAL MODIFICATION IN MULTICRYSTALLINE SI DURING DIRECTIONAL SOLIDIFICATION REVEALED BY SPATIALLY RESOLVED X-RAY ROCKING CURVE ANALYSIS

摘要

We show that spatially resolved X-ray rocking curve can be a powerful tool to investigate localstructures in multicrystalline Si as well as their modification during directional solidification when applied toappropriate samples. For this purpose, we carried out a model crystal growth experiment using a purposely designedseed crystal with a controlled grain boundary structure. Owing to the angle resolution smaller than 0.01o, structuralchanges around the grain boundary, which cannot be detected by electron back scattering pattern analysis, have beensuccessfully detected by the peak shift in the rocking curve.