Spatially resolved analysis of a sample using an X-ray fluorescence spectrometer

摘要

The field of view to a local portion of a specimen (2) irradiated by X-rays from an X-ray tube (1) is restricted with a view-restricting diaphragm (3). The fluorescent X-rays from the specimen passing through the view-restricting diaphragm are collimated by a primary Soller slit (4). A control unit (13) rotates the specimen at an arbitrary angle around the rotation center by controlling the rotation mechanism (10) and moves the view-restricting diaphragm through an arbitrary distance within a predetermined range in a direction perpendicular to the optical axis of said primary Soller slit (4) and along a radial direction around the rotation center of said specimen (2), thereby rotating the specimen at the arbitrary angle and moving the view-restricting diaphragm through the arbitrary distance so that the view-restricting diaphragm may face the local portion of the specimen. IMAGE