Inertial vibration cancellation for floor fields and stiff machine pedestals

摘要

A method for vibration cancellation is described which works favourably at the floor of semiconductor factories, by decreasing the vibration level with a factor 3-5 in the 10 - 100 Hz bandwidth. The method has the advantage that lower vibration levels can be achieved without loss of stiffness on the stiff factory floor. Dynamic and control aspects of the method are discussed and an example of what can be achieved is presented.