Numerical Simulation on Magnetic Field and Resonance Area in an Electron Cyclotron Resonance Plasma Reactor

摘要

Under the assumption of two-dimensional axis-symmetry, the magnetic field yielded by the current through the coils and the resonance area in an electron cyclotron resonance plasma reactor was computed numerically. For our reactor, the numerical results show that when the current of the magnetic field coils is less than. 78A, the magnetic field in the whole chamber is less than 875G and no resonance area; When the current of the magnetic field coils is more than 78A, the magnetic field in some area is more than 875G, and the resonance area can be obtained. When the current of the magnetic field coils is increased, the resonance area removes from the entrance toward to the inner area of the chamber.